半導體元件製造技術

臺北科技大學 115-1 學期課程，課號 367170。

課程大綱

半導體製造技術是近年來最關鍵的技術，本課程涵蓋了基於各種半導體製程知識以及先進元件發展，來協助學子進一步了解半導體的實際應用。(此課程為外國學生為主要上課學員，將以全英文教學進行) Semiconductor manufacturing technology is one of the most advanced technologies in recent years. This course covers the knowledge of various semiconductor fabrication processes and advanced devices to help students further understand the practical applications of semiconductors.

課程進度

Week 1: Introduction to the Semiconductor Industry Chain and Nanotechnology Week 2: Semiconductor Physics Week 3: Electrical fundamentals Week 4: Semiconductor Manufacturing: Silicon Wafer Week 5: Semiconductor Manufacturing: Oxidation and Diffusion Week 6: Semiconductor Manufacturing: Photolithography Week 7: Semiconductor Manufacturing: Ion Implantation and Plasma Week 8: Semiconductor Manufacturing: Etching Week 9: Midterm Exam Week 10: Semiconductor Manufacturing: Chemical Vapor Deposition (CVD) Week 11: Semiconductor Manufacturing: Metallization and Physical Vapor Deposition (PVD) Week 12: Semiconductor Manufacturing: Chemical Mechanical Polishing (CMP) Week 13: Semiconductor Manufacturing: Process Integration Week 14: Advanced Semiconductor Devices Week 15: Nanotechnology: Fullerene & Carbon nanotubes Week 16: Nanotechnology: Graphene Week 17: Nanotechnology: 2D Materials Week 18: Final Exam

評量方式

Attendance 10% Class quiz 30% Midterm 30% Final report 30%

教材

【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 Introduction to Semiconductor Manufacturing Technology by Hong Xiao (Author