半導體材料檢測技術及原理

臺北科技大學 115-1 學期課程，課號 366161。

• 學期：115-1
• 授課教師：楊重光
• 學分：3
• 選修
• 上課時段：週五 6、7、8 節

課程大綱

This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials.

課程進度

1-3 : X-ray diffraction (XRD) analysis and its theory fundamentals 4-6 : Scanning Electron Microscope (SEM) analysis and its theory fundamentals 7-9 : Atomic Force Microscope (AFM) analysis and its theory fundamentals 10-11 : Raman spectroscopy analysis and its theory fundamentals 12-13 : Fourier-Transform Infrared Spectroscopy (FTIR) analysis and its theory fundamentals 14-16 : Theory and the applications of x-ray photoelectron spectroscopy (XPS)

評量方式

50% Midterm exam 50% Final examination

教材

【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 Surface analysis-the principal technique, Vickerman, 2010