微奈米量測系統與技術

臺北科技大學 115-1 學期課程，課號 365919。

• 學期：115-1
• 授課教師：陳詩雯
• 學分：3
• 選修
• 上課時段：週三 A、B、C 節

課程大綱

To introduce the advanced systems and technology associated with micro- and nano-scale measurement.

課程進度

Week 1 : Introduction Week 2 : Optics Week 3 : Light and Matter Week 4 : Semiconductor Fabrication Evolution Week 5 : Micro and nano-measurement - Confocal techniques Week 6 : Micro and nano-measurement - Interferometry Week 7 : Micro and nano-measurement - SEM Week 8 : Micro and nano-measurement - AFM Week 9 : Mid-term presentation Week 10-15 : Spectrometer and Spectroscopy - UV-Vis, PL, Raman, FTIR. Week 16 : Final Exam Week 17 : Prepare Report Week 18 : Submit Report

評量方式

Mid-term presentation: 45% Final Exam: 45% Final Project:10%

教材

【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 1. 自編教材