高科技設施管理

臺北科技大學 114-2 學期課程，課號 360369。

課程大綱

This course introduces the principles and practices of facility engineering and management for high-tech industries, including semiconductor, FPD (Flat Panel Display), biotechnology, and precision manufacturing. It covers critical infrastructure such as cleanrooms, HVAC systems, UPW, chemical and gas supply, power distribution, energy efficiency, carbon neutrality, and operational resilience.

課程進度

Week 1 – Introduction Week 2 – Overview of Integrated Circuit Manufacturing Week 3 – Fundamentals of Semiconductors Week 4 – Wafer Fabrication Week 5 – Cleanrooms and HVAC Systems Week 6 – Ultrapure Water Treatment Week 7 – CCSS (Centralized Chemical Supply Systems) Week 8 – Centralized Gas Supply Systems Week 9 – Midterm Group Project Week 10 – Wastewater Treatment and Recycling Week 11 – Power Systems and FMCS (Facility Monitoring and Control) Week 12 – Facility Infrastructure Architecture Week 13 – ESH (Environment, Safety, and Health) Management Week 14 – Hook-up Design and Spatial Coordination Week 15 – Fab Design Evaluation and Construction Supervision Management Week 16 – Risk Assessment and Management Planning Week 17 – High-Tech Fab Construction and Operating Cost Analysis Week 18 – Final Group Project

評量方式

Midterm group project：35% Final group project：45% Participation & In-Class Activities：20%

教材

【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：否 Case studies