先進半導體設備

臺北科技大學 114-2 學期課程，課號 359884。

課程大綱

1.半導體: 5種模組介紹 - 真空、機器手臂、射頻/電漿、真空吸盤/加熱體、氣體儀表盤 - 從理論到應用。 8種半導體機台介紹 Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.期末海報展 1.Semiconductor: 5 Modules – Vacuum, Robot, Plasma/RF, Electric Static Chuck (ESC)/Heater and Gas Panel. 8 Equipment - Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.Factory Touring: Global Technical Learning Center (GTLC) Lab Touring at Hsinchu. 3.Top Executive Sharing: Worthy Horng – Cust Services & Supt, VP of AMAT. 4.Final Exam – Poster Exhibition.

課程進度

Week 2 Introduction to Course and Applied Materials Week 3 (1) Plasma/RF System and (2) Robot System - from Theory to Application Week 4 Electro-Static-Chuck (ESC)/Heater - from Theory to Application Week 5 Epi and RTP Equipment Week 7 (1) Vacuum System and (2) Gas Panel System - from Theory to Application Week 8 Implant Equipment Week 9 Metal Deposition Product (MDP) Equipment Week 11 (1) The Magic Within and (2) 機不可失 Week 12 Mid-Term Exam Week 13 Etch Equipment Week 14 Global Technical Learning Center (GTLC) Lab Touring Week 15 Process Diagnostic & Control (PDC) Equipment Week 16 Electro-Chemical Deposition (ECD) Equipment Week 18 Final Exam - Poster Exhibition

評量方式

40% Mid-Term Exam + 60% Final Exam - Poster Exhibition

教材

【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 1. VLSI製造技術 by 莊達人. 2. Introduction to Semiconductor Manufacturing Technology, by Hong Xiao. 3. Semiconductor Manufacturing Technology, by Michael Quirk and Julian Serda.