積體電路製程特論

臺北科技大學 114-2 學期課程，課號 359350。

• 學期：114-2
• 授課教師：徐曉萱
• 學分：3
• 選修
• 上課時段：週一 2、3、4 節

課程大綱

This course will introduce the semiconductor process, including device basics, process flow, manufacturing, and process integration. The students will gain a thorough overview on semiconductor manufacturing technology before working in industry. Language: English

課程進度

1. Introduction of IC Fabrication 2. Semiconductor Basics 3. Wafer Manufacturing and Epitaxy 4. Oxidation and Thermal Processes 5. CVD and PVD 6. Metallization 7. Photolithography 8. Process Integration

評量方式

Mid-term Exam 40% Final Exam 40% Class Participation: 20% (Homework, Classwork, Attendance)

教材

【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 Michael Quirk, Julian Serda, "Semiconductor Manufacturing Technology", Pearson, 2013 ISBN: 978-986-154-117-4